2024

Bonnema, M. J. S. , Veltkamp, H.-W. , Alveringh, D. , Wiegerink, R. J. , & Lötters, J. C. (2024). Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes. In 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 805-808). https://doi.org/10.1109/mems58180.2024.10439445

Bonnema, M. J. S. , Veltkamp, H.-W. , Wiegerink, R. J. , & Lötters, J. C. (2024). Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters. In The 5th Conference on MicroFluidic Handling Systems (pp. 53-56).

2023

Azadi Kenari, S. , Wiegerink, R. J. , Veltkamp, H.-W. , Sanders, R. G. P. , & Lötters, J. C. (2023). Thermal Flow Meter with Integrated Thermal Conductivity Sensor. Micromachines, 14(7), Article 1280. https://doi.org/10.3390/mi14071280

2022

Alveringh, D., Bijsterveld, D. G., Berg, T. E. V. D. , Veltkamp, H.-W. , Batenburg, K. M. , Sanders, R. G. P. , Lötters, J. C. , & Wiegerink, R. J. (2022). A miniature microclimate thermal flow sensor for horticultural applications. In 2022 IEEE Sensors Article 9967348 IEEE. https://doi.org/10.1109/SENSORS52175.2022.9967348

Veltkamp, H.-W., Janssens, Y. L. , de Boer, M. J. , Zhao, Y. , Wiegerink, R. J. , Tas, N. R. , & Lötters, J. C. (2022). Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD. Micromachines, 13(11), Article 1908. https://doi.org/10.3390/mi13111908

Alveringh, D. , van der Ven, D. L. , Veltkamp, H.-W. , Batenburg, K. M. , Sanders, R. G. P. , Fernandez Rivas, D. , & Wiegerink, R. J. (2022). Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout. In 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 684-687). IEEE. https://doi.org/10.1109/MEMS51670.2022.9699639

2021

Rho, H. S. , Veltkamp, H.-W., Baptista, D. , Gardeniers, H. , le Gac, S. , & Habibović, P. (2021). A 3D polydimethylsiloxane microhourglass-shaped channel array made by reflowing photoresist structures for engineering a blood capillary network. Methods, 190, 63-71. https://doi.org/10.1016/j.ymeth.2020.03.007

Yariesbouei, M. , Sparreboom, W. , Groenesteijn, J. , van Putten, J. H. , de Boer, M. J. , Wiegerink, R. J. , Veltkamp, H.-W., Yu, Q., Rodriguez Olguin, M. A. , & Lötters, J. C. (2021). Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel. (Patent No. WO2021054829). https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2021054829

Zhao, Y., Janssens, Y. L. , Veltkamp, H. W. , de Boer, M. J. , Groenesteijn, J. , Tas, N. R. , Wiegerink, R. J. , & Lötters, J. C. (2021). Sacrificial grid release technology: A versatile release concept for MEMS structures. Journal of micromechanics and microengineering, 31(4), Article 045013. https://doi.org/10.1088/1361-6439/abe7da

2020

Veltkamp, H.-W., Akegawa Monteiro, F. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2020). Disposable DNA Amplification Chips with Integrated Low-Cost Heaters. Micromachines, 11(3), Article 238. https://doi.org/10.3390/mi11030238

Zhao, Y. , Veltkamp, H.-W., Schut, T. V. P. , Sanders, R. G. P., Breazu, B. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2020). Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology. Micromachines, 11(6), Article 561. https://doi.org/10.3390/MI11060561

Rho, H. S. , Veltkamp, H.-W., Hanke, A. T., Ottens, M. , Breukers, C. , Habibović, P. , & Gardeniers, H. (2020). Systematic Investigation of Insulin Fibrillation on a Chip. Molecules, 25(6), Article 1380. https://doi.org/10.3390/molecules25061380

2019

Jonker, D. , Veltkamp, H. W. , Sanders, R. G. P. , Schlautmann, S., Giannasi, K. , Tiggelaar, R. M. , & Gardeniers, J. G. E. (2019). A factorial design approach to fracture pressure tests of microfluidic BF33 and D263T glass chips with side-port capillary connections. Journal of micromechanics and microengineering, 29(3), Article 035011. https://doi.org/10.1088/1361-6439/aafe5b

Veltkamp, H.-W. , Zhao, Y. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). A short post-processing method for high aspect ratio trenches after Bosch etching. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.

Rho, H. S. , Veltkamp, H.-W., Baptista, D. , le Gac, S. , & Habibovic, P. (2019). A simple and robust fabrication method for creating 3D tapered polydimethylsiloxane channels. In 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 1156-1157)

Zhao, Y. , Hueting, R. , Veltkamp, H.-W. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Device simulation of heavily doped silicon electrical resistivity at extremely high temperatures. In Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop 2019 (pp. 108-109). University of Twente.

Yu, Q. , Veltkamp, H.-W. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor. 103-105. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Veltkamp, H. W. , Zhao, Y. , De Boer, M. J. , Sanders, R. G. P. , Wiegerink, R. J. , & Lotters, J. C. (2019). High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 648-651). Article 8870667 IEEE. https://doi.org/10.1109/MEMSYS.2019.8870667

Veltkamp, H.-W. , Zhao, Y. , de Boer, M. J. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology. In 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS) (Vol. 32, pp. 648-651). IEEE.

Zhao, Y. , Veltkamp, H.-W., Schut, T. V. P. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology. 116-119. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Zhao, Y. , Veltkamp, H.-W., Schut, T. V. P. , Groenesteijn, J. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels. Abstract from 45th International Conference on Micro- and Nano-Engineering, MNE 2019, Rhodes, Greece.

Veltkamp, H.-W. , Zhao, Y. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards 3D printed microfluidic devices in α-alumina. 156-159. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Veltkamp, H.-W. , Zhao, Y. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards 3D printed microfluidic structures in alumina. In Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 120-121).

Akegawa Monteiro, F. , Veltkamp, H.-W. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards a disposable polymer-based micro-bioreactor. In Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 78-79).

Akegawa Monteiro, F. , Veltkamp, H.-W. , Sanders, R. G. P. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards a fully integrated and disposable DNA amplification chip. 128-131. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Veltkamp, H.-W. , Zhao, Y. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2019). Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?. 30-31. Abstract from Combura Symposium 2019, Soesterberg, Netherlands.

2018

Zhao, Y. , Veltkamp, H.-W. , de Boer, M. J. , Zeng, Y. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2018). Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 10). University of Twente.

Zhao, Y. , Veltkamp, H.-W. , Zeng, Y. , Lötters, J. C. , & Wiegerink, R. J. (2018). Method of fabricating a micro machined channel. (Patent No. WO2019054873A1). https://patents.google.com/patent/WO2019054873A1/en

Zhao, Y. , Veltkamp, H.-W. , Zeng, Y. , Lötters, J. C. , & Wiegerink, R. J. (2018). Micro machined fuel gas combustion unit. (Patent No. WO2019054872A1). https://patents.google.com/patent/WO2019054872A1/en

Sun, X. , Berenschot, E. J. W. , Veltkamp, H.-W. , Gardeniers, H. J. G. E. , & Tas, N. R. (2018). Scalable 3D Nanoparticle Trap for Electron Microscopy Analysis. Small, 14(48), Article 1803283. https://doi.org/10.1002/smll.201803283

Veltkamp, H.-W. , Zhao, Y. , de Boer, M. J. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2018). Trench-assisted surface channel technology (TASCT) as platform for high-temperature physical parameter sensing. In Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop (pp. 9). University of Twente.

2017

Zhao, Y. , Veltkamp, H.-W. , de Boer, M. J. , Zeng, Y. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2017). Design principles and fabrication method for a miniaturized fuel gas combustion reactor. In D. Alveringh (Ed.), The 3rd Conference on MicroFluidic Handling Systems: Conference Proceedings (pp. 37-40). University of Twente.

Veltkamp, H.-W. , Zhao, Y. , de Boer, M. J. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2017). Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate. In D. Alveringh (Ed.), The 3rd Conference on MicroFluidic Handling Systems: Conference Proceedings (pp. 114-117). University of Twente.

Zhao, Y. , Veltkamp, H.-W. , de Boer, M. J. , Zeng, Y. , Groenesteijn, J. , Wiegerink, R. J. , & Lötters, J. C. (2017). Fabrication process for a large volume silicon nitride micro-combustor. 450. Abstract from 43rd International Conference on Micro and Nanoengineering, Braga, Portugal.

Veltkamp, H.-W. , Zhao, Y. , de Boer, M. J. , Wiegerink, R. J. , & Lötters, J. C. (2017). Selective SiO2 etching in three dimensional structures using parylene-C as mask. 380. Abstract from 43rd International Conference on Micro and Nanoengineering, Braga, Portugal.

2016

Sun, X. , Veltkamp, H.-W. , Berenschot, J. W. , Gardeniers, J. G. E. , & Tas, N. R. (2016). Nano-pyramid arrays for nano-particle trapping. In Nano-pyramid arrays for nano-particle trapping (pp. 185-188). https://doi.org/10.1109/MEMSYS.2016.7421589